The protection function of the photoresist has been completed, and the excess photoresist is removed by the stripping solution in the stripping process.
The protection function of the photoresist has been completed, and the excess photoresist is removed by the stripping solution in the stripping process.
After the pattern is transferred, the photoresist is no longer needed, so it needs to be removed. There are usually two methods to remove glue: wet method and dry method. Wet method is to dissolve or corrode photoresist by using organic solvent or solution corrosive to photoresist, so as to achieve the purpose of removing glue. Here, the selection of removing glue solution needs to follow the prerequisite of reacting with the substrate or not damaging the substrate. Dry glue removal is to ash the photoresist by using oxygen plasma, so as to achieve the purpose of glue removal.